针对球形光学元件的表面质量检测, 开发了一种基于数字全息的表面曲率参数及疵病的同步检测方法。利用最小二乘法对再现波前进行参数拟合和计算, 解决了再现过程中倾斜因子补偿对测量可靠性造成的影响。通过将原始数据与生成的虚拟曲面相减实现了表面疵病信息的同步提取。实验证明, 该方法的测量结果与白光干涉仪的测量差异小于1.5%, 在不同倾斜因子补偿系数作用下的测量结果误差小于1%。

A digital holographic method is proposed to detect the surface quanlity of optic-components with spherical surface. It can obtain the surface curvature radius and defects simultaneously, and uses the least square parameter calculation to avoid the effects of tilt compensation. The defects are extracted by subtracting a simulated spherical surface generated by the calculated parameters from reconstruction data. Validity of the method is demonstrated by experiments. The difference is less than 1.5% between the results of the proposed method and white light interferometer, and less than 1% among the results obtained with different tilt compensation factors.