红外, 2012, 33 (3): 22, 网络出版: 2012-03-17   

基于ZEMAX的半导体激光准直镜设计方法研究

Research on Semiconductor Collimator Design Based on ZEMAX
作者单位
电子测试技术重点实验室,山东 青岛 266555
摘要
针对目前采用单个球面镜压缩激光时存在发散角效 果差或者球面镜片数过多的问题,通过ABCD矩阵法从理论上对高斯光束经过单透镜时的传输特性进行了分析,得出了单透镜无法实现半导体激光光束 理想准直的结论。提出了一种基于ZEMAX的半导体光源准直镜的设计方案,并给出了设计与优化方法。结合工程中常用的808 nm半导体激光器,设 计了双片型808 nm半导体激光准直镜,并在ZEMAX中使用合适的优化函数和权重对像差进行了校正。通过采用非球面镜获得了较好的准直效 果,发散角达到了0.032 mrad。该设计使用的镜片数较少,结构简单。
Abstract
When a single spherical mirror is used to compress laser beams, there usually is a problem that the poor divergence can be resulted in or too many spherical lenses have to be used. By using a ABCD matrix method to analyze the Gauss beam passing through a single lens in theory, a conclusion that the beam from a semiconductor laser can not be collimated ideally with a single lens is drew. A design scheme based on ZEMAX is proposed for the collimation of a semiconductor laser source. The design and optimization method is given. For a 808 nm semiconductor laser commonly used in engineering, a collimator with two lenses is designed and its aberration is corrected by using the proper optimization function and weight in ZEMAX. By using a non-spherical surface, fine collimation is implemented at a divergence angle of 0.032 mrad. This design has the features of less lenses and simple structure.

聂建华, 王峻宁. 基于ZEMAX的半导体激光准直镜设计方法研究[J]. 红外, 2012, 33(3): 22. NIE Jian-hua, WANG Jun-ning. Research on Semiconductor Collimator Design Based on ZEMAX[J]. INFRARED, 2012, 33(3): 22.

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