为满足卫星激光通信中超高速数据传输的特殊要求，采用电子束和离子辅助沉积技术，制备了532 nm、632 nm和1 064 nm波长处高反射，808 nm和1 550 nm处高透射的多波段滤光膜.选取了H4和SiO2作为高低折射率材料，通过对膜系设计曲线的不断优化，减少了灵敏层的个数，得到了相对易于制备的膜系结构；采用电子束加热蒸发方法并加以离子辅助沉积系统制备薄膜, 采用光控与晶控同时监控的方法控制膜厚；通过不断调整工艺，提高了薄膜的抗激光损伤能力，减小了膜厚控制误差，提高了透射波段的透过率及反射波段的反射率，最终得到了光谱性能较好的滤光膜.该薄膜能够承受雨淋、盐雾、高低温等环境测试，满足使用要求.

In order to satisfy the special requirements of super velocity data transmission in satellite laser communication, a type of multi-band filter membrane with high reflection at 532 nm, 632 nm, 1 064 nm wavelengths and high transmission at 808 nm, 1 550 nm wavelengths is prepared, adopting electronic beaming vacuum depositing method with the aid of ion assistant deposition technology. By selecting H4 and SiO2 as the high and low refractive index materials, continually optimizing the film system design curve, reducing the number of sensitive layers, the film structure is obtained that is easily prepared. The thin films are prepared through electron beam heating evaporation and ion assisted deposition system, and the film thickness is controlled using crystal-controlled and light control monitoring methods at the same time. By continually adjusting the process, the film laser damage resistance ability is improved, the control error is reduced, the transmittance of the transmission band and the reflectance of the reflection band are increased, and the filter membrane with better spectral performance is obtained. The experimental results show that the filter membrane can withstand rain, salt spray, high and low temperature and other environments, and meet the requirements in satellite laser communication.