文章提出了一种以MEMS TOF（微电子机械系统可调光滤波器）和标准具作为波长选择元件，LC（液晶)作为相位补偿元件，平面反射镜提供光反馈的可调外腔半导体激光器结构。实际研制了该结构的激光器样品，实验测得该激光器的输出功率＞10 dBm，边模抑制比＞50 dB，可调谐范围达到7 nm，线宽约为200 kHz。

A novel tunable external-cavity semiconductor laser structure is presented in this paper, in which an MEMS-based Tunable Optical Filter (TOF) and a silicon etlon are used as the wavelength selection components and a Liquid Crystal (LC) cell as the phase compensation element and a planar reflector to provide feedback. A laser sample in this structure is developed. The experimental results show that its output power and side mode suppression ratio are ＞10 dBm and ＞50 dB respectively, its tuning range is as high as 7 nm and its linewidth about 200 kHz.