高功率激光器中，金属颗粒作为元件表面污染的一种，对熔石英元件寿命的影响早已得到关注。为了定量得到金属颗粒对熔石英元件损伤阈值的影响，在中国科学院上海光学精密机械研究所薄膜中心的标准损伤测试平台上，对未被污染的以及被3种不同金属颗粒(Al、Cu、Fe)污染的熔石英元件的损伤阈值进行了测量。研究发现，被金属颗粒污染的熔石英元件，损伤阈值会降低为原来的20%～30%；吸收系数高的金属颗粒更容易诱导损伤，损伤形貌与未污染的熔石英损伤形貌也有很大的差别；离线观测样品形貌，可以从微观的角度观察到损伤的概率行为。参考损伤的爆炸模型，粗略地模拟了温度随时间的变化。

In high-power laser, as a kind of contamination on the surface of fused silica, the metal particles has been long concerned. In order to measure the influence of metal particles on damage threshold of fused silica quantitatively, damage threshold of uncontaminated and contaminated (by Al, Cu, Fe) Corning7980 fused silica is tested on the standard damage test platform in Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences. Research finds that, the damage threshold of contaminated fused silica is reduced to 20%~30% compared to the uncontaminated, the higher-absorption-coefficient metal particles induce damage more easily, and damage morphology is very different. The uncertain behavior and probability of damage is offline observed from microscopics point of view. Refer to the damage explosion model, the temperature changes over time is roughly simulated.