中国激光, 2012, 39 (5): 0508005, 网络出版: 2012-04-13
利用空域滤波虚光栅叠栅法提取干涉图波面
Wavefront Acquirement of Single Interferogram Using the Virtual Grating Moiré Fringe Method with Gaussian Filter in the Spatial Domain
测量 干涉测量 虚光栅叠栅条纹法 波面 空间滤波 measurement interferometry the virtual grating Moiré fringe method wavefront spatial filter
摘要
虚光栅叠栅条纹法是一种利用单幅干涉图提取波面信息的方法,为了解决叠栅条纹的滤波问题,提出了一种基于高斯函数的空域滤波法。利用高斯函数在空域中对叠栅条纹图进行模糊处理,滤除不需要的高频分量,仅保留包含波面相位信息的低频分量。重点研究了高斯函数滤波窗口的选择和干涉图的载频之间的对应关系。该方法具有计算量小、易于选取滤波窗口的优点。对一光学平面的面形测量结果表明,利用空域滤波虚光栅叠栅法提取的波面[峰谷(PV)值为0.080λ,均方根(RMS)值为0.020λ,λ=632.8 nm]与利用Zygo GPI干涉仪的四步移相法得到的波面(PV值为0.079λ,RMS值为0.017λ)相吻合。
Abstract
The virtual grating Moiré fringe is a method to acquire the test wavefront using single interferogram. The Gaussian function is used to filter Moiré interferogram in the spatial domain. The Moiré interferogram is blurred by Gaussian filter in the spatial domain, thus the high frequency component is filtered out, leaving the low frequency component which contains the test phase information. The relationship between the window of Gaussian filter and the carrier frequency of the interferogram is given. The amount of calculation of the method is low and it is easy to select the filter window. The wavefront of a plane is measured using Zygo phase shifting interferometer, whose result (dPV=0.080λ, xRMS=0.020λ, λ=632.8 nm) coincides with the one obtained by the virtual grating Moiré fringe method (dPV=0.079λ,xRMS=0.017λ).
王军, 陈磊, 吴泉英. 利用空域滤波虚光栅叠栅法提取干涉图波面[J]. 中国激光, 2012, 39(5): 0508005. Wang Jun, Chen Lei, Wu Quanying. Wavefront Acquirement of Single Interferogram Using the Virtual Grating Moiré Fringe Method with Gaussian Filter in the Spatial Domain[J]. Chinese Journal of Lasers, 2012, 39(5): 0508005.