为满足精密薄板厚度在线测量的精密性、实时性和可靠性要求, 将基于调制、带通滤波和峰值检测的信号处理技术与激光三角法相结合, 设计了高精度 PSD微位移传感器, 并利用多个传感器和差动三角法制作了采样速率达到 1 kHz, 测量厚度范围为 6 mm, 测量精度可达 10滋m的薄板多点测厚系统原理样机。系统基于 SOPC技术, 在 FPGA内扩展了多个串口作为测量数据传输通道, 同时采用 ARM9微处理器做控制中心, 利用其内部的 SMC(静态存储控制器)与 FPGA连接, 实现了测量数据的实时传输、处理和显示。最后, 对系统的稳定性以及影响因素进行了测量和分析。

The online measurement of precise sheet thickness needs to be precise, real -time and reliable. In order to meet the requirements above, we designeda PSD (position sensitive detector) micro-displacement sensor, based on the combination of lasertriangulation and signal processing technology mainly including modulation, band -pass filtering and peak detection.Meanwhile, weproduced a sheet multi-point thickness measurement prototype which the sampling rate up to 1 kHz, the measure thickness up to6mm and the measurement accuracy up to 10滋m by using PSD micro-displacement sensors and differential triangulation .The systemexpanded more than one serial port as the channels of measurement data based on SOPC technology in FPGA, while using ARM9microprocessor as a control center, using its internal SMC (static memory controller) to connect FPGA, and the measurement data get a real -time transmission, processing and display. And last, the system stability and interfering factors were also measured and analyzed.