设计的10级低阻抗紧凑型Marx发生器整体体积约0.12 m3，输出功率为30 GW，脉宽200 ns。该发生器采用正负充电，触发开关为三电极场畸变开关，其余开关采用过压自击穿开关；经优化设计，自击穿开关高33 mm、电感13.1 nH，触发开关高42 mm、电感15.2 nH。电容正负电极片与开关电极采用挤压连接，电极片间绝缘材料为聚丙烯薄膜，薄膜共100层,总厚度2 mm，耐受电压大于100 kV；Maxwell模拟表明：此种连接方式可将每个电极连接片电感降低到4.16 nH。Pspice电路模拟和实验均表明：电容器充电100 kV条件下，12 Ω负载上可获得电压高于600 kV、峰值电流大于50 kA的输出。

A 10-staged low impedance Marx generator is designed, whose volume is about 0.12 m3 and output power and pulse width are more than 30 GW and 200 ns respectively. The generator is charged synchronously with positive and negative voltages. Its triggered-switch is three-electrode field distortion switch and other switches are over-voltage self-breakdown switches. After optimization design, the heights of the self-breakdown switches and triggered switch are 33, and 42 mm, and the inductances are 13.1 and 15.2 nH, respectively. The positive and negative electrodes of the capacitor are pressed within the switch’s electrode. The insulator within the electrodes of the capacitor is 100 layers of polypropylene, whose total thickness is about 2 mm, and it can withstand the voltage over 100 kV. Additionally, Maxwell 3D simulation shows that, the inductance of the electrode connecting plate is 4.16 nH in this connection manner. Pspice circuit simulation and experiment show that, when the capacitor is charged at 100 kV, the output voltage is more than 600 kV and the peak current is about 50 kA on the 12 Ω load.