针对现有太赫兹辐射源在输出频率可调性及输出功率方面的局限性。本文从非线性介质的 Maxwell方程入手对非线性聚合物的光学性质进行理论分析，建立硅波导配置的数学模型。利用硅材料的高折射率，设计了硅太赫兹波导。分析了太赫兹波导模式图，讨论了硅太赫兹波导模式的有效折射率、波导损耗、连续波输出功率与输出频率的关系，实验结果表明：硅太赫兹波导产生的太赫兹波连续可调，输出太赫兹波频率范围宽至 0.1 THz到 15 THz，输出功率可达到微瓦级。

To solve limitations of existing terahertz radiation in the tunable range of output frequency and output power, it started from Maxwell's equations of nonlinear medium to analyze the optical properties of the nonlinear polymer theoretically, and a mathematical model of silicon waveguide configuration was established. The high refractive index of silicon was used to design the silicon terahertz waveguide. It also analyzed the mode map of terahertz waveguide, and discussed the effective index, waveguide loss, and the relationship between continuous-wave’s output power and output frequency of silicon terahertz waveguide mode. The experimental results show that terahertz generated from silicon terahertz waveguide is tunable in the range of 0.1 THz to 15 THz continuously at room temperature, and its output power can reach several micro-watts.