光学 精密工程, 2012, 20 (6): 1265, 网络出版: 2012-06-25
压电陶瓷微动台的复合控制
Feed-forward control of piezoelectric ceramic positioning stage
压电陶瓷 迟滞特性 改进的PI迟滞模型 前馈控制 动态定位精度 piezoelectric ceramic hysteresis characteristic modified PI hysteresis model feed-forward controll dynamic positioning precision
摘要
压电陶瓷微动台的迟滞非线性严重影响其动态定位精度,为了解决这一问题,采用一种改进的PI模型对微动台的迟滞非线性进行了建模。为了提高传统PID算法对压电陶瓷微动台的动态定位性能,将改进的PI模型与传统PID算法组合构成前馈复合控制算法,并进行了微动台的慢速与快速动态定位实验。结果表明,对同频曲线定位时,前馈PID复合算法的最大误差为传统PID算法的40%左右,平均误差为传统算法的20%~30%左右;对多频曲线定位时,前馈PID复合算法的最大误差和平均误差为传统PID算法的33%左右。数据表明前馈PID复合算法的动态定位性能明显优于传统PID算法。
Abstract
As the nonlinear hysteresis of a piezoelectric ceramic positioning stage affects its dynamic positioning precision badly, this paper proposes a model for the piezoelectric ceramic hysteresis based on a modified PI hysteresis model. In order to improve the dynamic positioning precision of the piezoelectric ceramic positioning stage based on traditional PID algorithm, the feed-forward control is constituted with the modified PI inverse hysteresis model and a traditional PID, and the experiments on slow speed and high speed positionings are performed. Experimental results show that the maximal error and mean error of the feed-forward controller are 40% and 20%-30% that of traditional PID algorithm for tracking single frequency trajectory.For multi-frequency trajectory tracking,the feed-forward controller has better dynamic control effect, and both maximal error and mean error are almost 33% that of traditional one.These data indicate the availability of the feed-forward control algorithm.
王俐, 饶长辉, 饶学军. 压电陶瓷微动台的复合控制[J]. 光学 精密工程, 2012, 20(6): 1265. WANG Li, RAO Chang-hui, RAO Xue-jun. Feed-forward control of piezoelectric ceramic positioning stage[J]. Optics and Precision Engineering, 2012, 20(6): 1265.