研究了月球表面高温、强辐射的空间环境下Mo/Si多层膜的热稳定性和辐照稳定性。Mo/Si多层膜采用磁控溅射法镀制，将制备好的多层膜在100 ℃和200 ℃高温下加热，利用激光等离子体反射率计和X射线衍射仪(XRD)对加热前后的多层膜进行了测量。结果显示在200 ℃以内，多层膜反射率和中心波长没有显著变化，表现出良好的热稳定性。利用Monte Carlo方法模拟了质子在多层膜内造成的缺陷的分布和浓度分布。模拟显示，能量大的质子沉积在多层膜内部，造成的缺陷也集中在多层膜内部。用能量为60 keV，剂量分别为3×1012 cm-2和3×1014 cm-2的质子对Mo/Si多层膜进行辐照实验。发现多层膜内部出现了烧蚀损伤缺陷及节瘤缺陷。结果表明能量相同时，辐照剂量越大对多层膜反射率影响越大。

The thermal stability and irradiation stability of the Mo/Si multilayer in the high temperature and strong radiation environment of the lunar surface are analyzed. The Mo/Si multilayers are measured by hard X-ray diffractometer (XRD) and laser plasma reflectometer (LPR) before and after heating (in a vacuum chamber) at 100 ℃ and 200 ℃. The results show that there is almost no change in the reflectivity and central wavelength of the Mo/Si multilayer. The distribution of the defects and its density in the Mo/Si multilayer is simulated by Mote Carlo method. It shows that the protons and the defects concentrate in the inner of the multilayer with higher energy protons. The Mo/Si multilayers are irradiated by protons with the energy of 60 keV and the dose 3×1012 cm-2 and 3×1014 cm-2 respectively. The erosion defects and nodule defects are observed in the multilayer after irradiation by protons. The results show that the influence on the Mo/Si multilayers is proportional to the dose of the protons with the same energy.