应用光学, 2012, 33 (3): 511, 网络出版: 2012-08-02
横向剪切干涉中剪切量的选取及分析
Selection and analysis of shearing displacement in lateral shearing interferometry
摘要
横向剪切干涉技术是一种直接测量波面相位分布的光学测量方法,由于其不需要高精度的参考平面,并且能够测量偏离量较大的表面面形偏差,因此得到了更为广泛的应用。但是,通常情况下剪切量大小的选择凭工作经验来确定。为了给出一种定量的剪切量判定方法,论文提出了一种基于Zernike多项式拟合的剪切量判定方法,通过计算机仿真和实验给出了剪切量与测量误差的关系,发现剪切量为测量口径1/10时即可达到良好的测量结果。
Abstract
Lateral shearing interferometry is an important optical measurement technology which obtains the wave-front phase distribution directly. Due to the ability of measuring surface shape of large deviation without high precision reference plane, it has been used in various fields;however, the selection of shearing displacement depends on work experience. In order to provide an explicit determination method, a shearing displacement determination method based on Zernike polynomial fitting is proposed, and the relation between shearing displacement and measurement error is given by computer simulation and experiment.
刘丙才, 田爱玲, 王红军, 王春慧. 横向剪切干涉中剪切量的选取及分析[J]. 应用光学, 2012, 33(3): 511. LIU Bing-cai, TIAN Ai-ling, WANG Hong-jun, WANG Chun-hui. Selection and analysis of shearing displacement in lateral shearing interferometry[J]. Journal of Applied Optics, 2012, 33(3): 511.