激光与光电子学进展, 2012, 49 (9): 091402, 网络出版: 2012-08-03
CO2激光切割电子强化玻璃过程的有限元模拟与实验
Numerical Simulation and Experiment of CO2 Laser Cutting Electronic Strengthened Glass
激光技术 CO2激光 激光切割 电子强化玻璃 温度场 laser technique CO2 laser laser cutting electronic strengthened glass temperature field
摘要
在激光热裂法切割玻璃的过程中,温度起着至关重要的作用。为了准确掌握切割过程中温度场的分布,提高切割质量,提出了一种CO2激光切割玻璃基板的数值模拟方法。在ANSYS有限元环境下,建立了激光热应力切割电子强化玻璃的三维有限元分析模型,对温度场进行了分析。通过实验验证,得到了切割过程中温度场在不同参数下的变化及其对切割质量的影响以及温度分布与激光功率、光斑尺寸和扫描速度的非线性关系。
Abstract
Temperature plays a vital role in the laser cutting glass substrate process. To know the dynamic distribution of temperature and improve the cutting quality, a simulation method for temperature field is proposed. The three-dimensional finite element analytic model of the CO2 laser thermal stress in cutting electronic strengthened glass is put forward and the temperature field is analyzed in finite element analysis software ANSYS. The changes of temperature field with different parameters and the effects on the cutting quality are studied. The relations between distribution of temperature and parameters including laser power, spot size and scanning speed are obtained. Certain guidance in selection of parameters in actual process is manifested.
王星罡, 周明, 狄建科, 赵裕兴. CO2激光切割电子强化玻璃过程的有限元模拟与实验[J]. 激光与光电子学进展, 2012, 49(9): 091402. Wang Xinggang, Zhou Ming, Di Jianke, Zhao Yuxing. Numerical Simulation and Experiment of CO2 Laser Cutting Electronic Strengthened Glass[J]. Laser & Optoelectronics Progress, 2012, 49(9): 091402.