设计并制作了用于测量波长大于150 μm(频率低于2 THz)的太赫兹波波长的金属网栅法布里珀罗干涉仪(FPI)。采用光电子微纳制造工艺制作了五组周期不大于40 μm，线宽不大于10 μm的有衬底方形金属网栅，利用太赫兹时域光谱技术测量了金属网栅的太赫兹波段光电特性，得到了各组金属网栅在感兴趣频段的反射率和金属网栅FPI的反射精细度，结果表明所制作的金属网栅FPI均可用于测量波长大于150 μm的太赫兹波。实验搭建金属网栅FPI扫描测量了212 μm的太赫兹波波长，与理论结果吻合。研究了金属网栅FPI对太赫兹波偏振方向的依赖性以及对FPI腔镜平行度的要求，结果表明，方形金属网栅FPI对正入射太赫兹波偏振方向不敏感，而对FPI腔镜平行度很敏感。

Several metallic mesh Fabry-Pérot interferometers (FPI) are designed and manufactured to measure terahertz waves with wavelengths larger than 150 μm (that is less than 2 THz in frequency). Metallic meshes with five different structural parameters whose periods are less than 40 μm and linewidths are less than 10 μm are fabricated by employing optoelectronics micro-nano manufacturing technology. By using terahertz time-domain spectroscopy, the refractive indices of the meshes and the refractive finesses of the FPI in terahertz wave band are obtained. Results show that all the meshes can work well for the interesting wavelengths. In order to test the feasibilities of the FPI, a wavelength of 212 μm is measured. Results show good agreements with theory. Moreover, dependences on the polarization orientation of the terahertz waves and the parallelism of the FPI are also demonstrated, and it is found that the FPI is insensitive to the polarization of the terahertz waves while susceptible to the parallelism of the FPI.