中阶梯光栅光谱仪是一种高分辨率、 高精度新型光谱仪器, 其分辨率可达到几万至几十万, 结构参数的微小偏差严重影响着其分辨率和波长标定精度, 所以精确的装调方法是保证中阶梯光栅光谱仪性能指标的重要环节之一。 针对中阶梯光栅光谱仪的结构特点, 对中阶梯光栅光谱仪精确装调方法进行了研究。 该方法简便、 快捷, 适用于小体积、 封闭式结构设计的中阶梯光栅光谱仪。 通过该方法的装调, 使中阶梯光栅光谱仪工作状态与设计结果一致。 给出了最终波长标定结果, 其波长标定误差小于0.002 nm, 满足系统性能要求。

Echelle spectrograph is a new type of high-resolution, high-precise spectrograph, and its resolution can be up to tens of thousands to hundreds of thousands. In this case, a little error of the structure will affect the resolution and precision greatly, so an accurate adjustment is of importance for the echelle spectrograph. According to the design features, the present paper discusses the adjustment method for echelle spectrograph. This is an uncomplicated, quick method, and adapts to mini, airproof structure of echelle spectrograph. Using this method, the actual state is consistent with the design result. The result of wavelength calibration is given out, and the error is less than 0.002 nm, which satisfies the requirement of the system.