提出了一种轴向填充率渐变型二维三角晶格方空气孔光子晶体, 由锥形孔周期性排布而成, 在第三维也就是沿空气孔的轴向, 空气孔的尺寸连续改变, 实现了填充率渐变, 填充率f范围为0.700～0.866。经过模拟, 在归一化波长(λ/a)的1.43～2.71和3.41～4.00波段, 轴向填充率渐变型光子晶体可以将光向填充率小的方向偏折, 具有选光功能。采用电化学腐蚀与MEMS工艺相结合的方式, 在p型(100)硅基底上制作了轴向填充率渐变型二维三角晶格方孔光子晶体, 整个孔的填充率f在0.800～0.866范围内。

This paper presents a kind of axially filling-factor graded 2D triangular lattice air holes photonic crystals. The PC is periodically composed of conical holes. The size of air holes continuously changes along the axis of air holes. The filling-factor changes from 0.700 to 0.866. Simulation results show that in range of normalized wavelength (λ/a) 1.43～2.71 and 3.41～4.00, the horizontal incident light is deflected to the bottom of photonic crystals as well as the small filling rate part. The sample has the function of splitting light. And axially filling-factor graded 2D triangular lattice air holes photonic crystals are prepared on p-Si(100) wafers by electrochemical etching and MEMS technique, the filling rate ranging from 0.800 to 0.866.