针对神光Ⅲ主机装置真空靶室系统横向刚度较弱、必须进行现场精密加工和安装等研制中的技术难题, 对真空靶室组件的结构和整体加工工艺进行了设计。结合靶场总体稳定性设计思路, 设计了垂直支撑结构和能提供摩擦阻尼耗能的横向支撑结构, 并对壁厚进行了优化设计。通过使用开孔器、六维调节结构和激光跟踪仪, 设计修配调整垫等, 解决了现场精密加工问题, 实现了靶室与靶场基准体系的精密对接。计算结果表明, 48束打靶透镜平均平动位移均方根值为2.8 μm。建成后, 靶室中心高度偏差为±0.12 mm, 水平偏差达到±0.18 mm, 各重要联接法兰对心偏差达到0.35～0.40 mm。

In order to solve technical issues in the development of vaccum target chamber in Shenguang-Ⅲ laser facility, such as weak lateral stiffness and field precision fabrication and installation, the structural design and the whole manufacture process have been proposed. Combining the global stability design of the target area, the vertical pedestal, and the lateral support structure that can provide passive damping have been designed. The thickness of the chamber shell has been optimized. The alignment precision of the field fabrication of the target chamber is satisfied by using the special fixtures, i. e. the laser tracker, the six dimensional adjustment mechanism, and the custom-machined spacers, for accurately boring holes. The analysis shows that the mean root-mean-square value of displacement of 48 focusing lenses is 2.8 μm. After construction, the height deviation of the target chamber center is ±0.12 mm, the horizontal deviation is ±0.18 mm. The centering deviations of the important flanges are from 0.35 mm to 0.4 mm.