激光与光电子学进展, 2012, 49 (11): 110902, 网络出版: 2012-10-18
用于凹非球面的计算全息设计及其误差分析
Design and Error Analysis of the Computer-Generated Helogram Used for Concave Aspheric Surface Testing
全息术 非球面检测 计算全息图 光学设计 误差分析 holography aspheric-surface testing computer-generated holograms optical design error analysis
摘要
为实现非球面元件表面面形的高精度检测,提出并设计了一种兼具相位补偿、装调计算全息图(CGH)和待测非球面的多功能计算全息图。多功能计算全息图由主全息、对准全息和基准全息3部分组成。介绍了各部分的工作原理及其设计方法,比较了辅助全息装调方法和普通装调方法的优劣,并给出了检测Φ187.72 mm、F数为1.71的凹非球面镜的计算全息设计实例,分析了影响全息检测精度的各项误差源,计算得出所设计的计算全息的检测精度可达4.75 nm,实现了非球面元件面形的高精度检测。
Abstract
In order to test concave aspheric surfaces precisely, a multifunctional computer-generated hologram (CGH) which can compensate wavefront in null test, adjust the relative position between CGH and interferometer and adjust the relative position between CGH and the tested aspheric surface is proposed and designed. It consists of three segments, called main CGH, alignment CGH and fiducial CGH. The principle of testing aspheric surfaces is reviewed and the design method is introduced. The pros and cons of the auxiliary CGH adjustment method and the common adjustment method are compared. Then a design example for testing a paraboloidal mirror (Φ187.72 mm、F number is 1.71) is presented. The effects of CGH fabrication errors on the accuracy of interferometric measurements are analyzed. The accuracy of using a CGH to measure the surface is 4.47 nm. The designed CGH meets the requirements of high precision aspheric surfaces testing.
冯婕, 邓超, 邢廷文. 用于凹非球面的计算全息设计及其误差分析[J]. 激光与光电子学进展, 2012, 49(11): 110902. Feng Jie, Deng Chao, Xing Tingwen. Design and Error Analysis of the Computer-Generated Helogram Used for Concave Aspheric Surface Testing[J]. Laser & Optoelectronics Progress, 2012, 49(11): 110902.