中国激光, 2012, 39 (11): 1107001, 网络出版: 2012-10-18
组合套镀法制备2.0~2.4 μm波段8通道微型集成滤光片
Fabrication of 8-Channel Micro Integrated Filter in 2.0~2.4 μm by Combine Masks and Plating
薄膜 光学薄膜 集成滤光片 间隔层 组合套镀 thin film optical film integrated filter spacer layer combine masks and plating
摘要
利用组合套镀法布里珀罗结构光学薄膜滤光片间隔层的方法,选取锗和一氧化硅分别作为高低折射率膜层材料,在短波红外区域2.0~2.4 μm光谱范围内,设计并制备了8通道集成窄带滤光片,单个光谱通道的有效通光区域的宽度为450 μm,其间有30 μm的挡光过渡带。各通道的峰值光谱透射率大于65%,滤光片的半峰全宽为8~13 nm,相对带宽在0.33%~0.65%之间。
Abstract
Using the method to combine masks and plating the spacer layer of the Fabry-Perot filter, germanium and silicon oxide are selected as the high and low index coating materials, 8-channel integrated filter is designed and fabricated with an effective light-transmitting width of 450 μm separated by a block of 30 μm for each channel in the spectral regions of 2.0~2.4 μm. For each channel, the maximum transmittance is greater than 65%, the full width at half maximum (FWHM) is 8~13 nm, as well as, the relative bandwidth is between 0.33%~0.65%.
罗海瀚, 李耀鹏, 蔡清元, 刘定权. 组合套镀法制备2.0~2.4 μm波段8通道微型集成滤光片[J]. 中国激光, 2012, 39(11): 1107001. Luo Haihan, Li Yaopeng, Cai Qingyuan, Liu Dingquan. Fabrication of 8-Channel Micro Integrated Filter in 2.0~2.4 μm by Combine Masks and Plating[J]. Chinese Journal of Lasers, 2012, 39(11): 1107001.