中国激光, 1985, 12 (8): 488, 网络出版: 2012-11-06
快放电激励准分子激光器的过压击穿及其测量装置
Over-voltage breakdown and measurement equipment for the excimer laser using fast discharge excitation
摘要
本文报道了采用电阻分压器测量准分子激光器放电电压的实验结果.讨论了影响测量装置性能的各种因素和消除办法,并研究了器件的过压击穿形式及其变化规律.
Abstract
This paper presents the experimental results on. measuring the discharge voltage of an cxcimcr laser using a voltage divider. Also discussed are various factors impairing the performance of the measurement equipment and the ways for limination of over-voltage breakdown and the variation law.
夏康民, 傅淑芬, 陈建文. 快放电激励准分子激光器的过压击穿及其测量装置[J]. 中国激光, 1985, 12(8): 488. Xia Kangmin, Fu Shufen, Chen Jianwen. Over-voltage breakdown and measurement equipment for the excimer laser using fast discharge excitation[J]. Chinese Journal of Lasers, 1985, 12(8): 488.
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