飞秒激光脉冲通过非线性相互作用可以在透明介质内部诱导载流子的激发、弛豫和折射率改变，从而用于制备光波导器件。飞秒激光无法比拟的高度局域三维加工能力使其在有源和无源波导器件制备中被广泛研究。综述了飞秒激光在多种透明介质中诱导折射率改变的机理、波导器件制备的实验进展和波导性能优化技术，分析了其研究趋势和应用前景。

Femtosecond laser pulses can induce carrier excitation, relaxation and refractive index change via nonlinear interaction in transparent dielectrics, which then act as optical waveguide. The fabrication of active and passive optical waveguide devices by femtosecond laser has been extensively researched owing to its unrivaled highly-localized and three-dimensional machining capability. In this paper, three aspects of femtosecond laser-induced waveguide devices are introduced. The mechanisms of femtosecond laser-induced refractive-index change is discussed. Recent experimental progress regarding the fabrication waveguide is reviewed. At last, the future trends and application prospects of femtosecond laser-induced waveguide devices are analyzed.