随着纳米科学的迅速发展,对纳米计量技术也提出了更高要求。目前,纳米计量技术已经实现在几十微米量程范围内具有亚纳米甚至皮米量级的测量分辨率。回顾了现在主要的纳米计量技术,包括激光干涉仪、差拍F-P干涉仪、X射线干涉仪、光学+X射线干涉仪、基于频率测量技术和光频梳技术等,介绍了其工作原理、技术特点、应用范围及其最新研究进展。

With the rapid development of nanometer science, there will be much higher standard on nanometrology technology. So far, the uncertainty of measurement can be realized sub-nanometer and even picometer in the range of dozens of micrometers. The current main technologies used in nanometrology have been reviewed, which include the laser interferometer, beat frequency F-P interferometer, X-ray interferometer, optical and X-ray interferometer, frequency measuring system and optical frequency comb technology.