光学学报, 2012, 32 (s1): s112003, 网络出版: 2012-12-24  

基于条纹反射的非球面测量及系统结构分析

Aspheric Surface Measurement Based on Fringe Reflection and Analysis of System′s Structure
作者单位
南京理工大学电子工程与光电技术学院, 江苏 南京 210094
摘要
详细介绍了依据条纹反射术(PMD)测量镜面的原理和方法。通过实验验证了这种方法。在结果分析中给出了这种方法的弊端,远心光路结构本身含有系统误差,在相位求解过程中具有积分非闭合性误差和误差本身随积分传递等问题。另外给出了绝对面形测量系统结构,这种结构能够很好地剔除PMD测量方法的缺点。通过分析可知合理设置参数来得到方程组是测量的关键。
Abstract
The measurement principle of phase measuring deflectometry (PMD) is discussed and the algorithm are validated by experiment. The short point is presented in result analysis. First the far-away system is approximated and has error by itself. Then the phase can′t be calculated correctly by numerical integration for the open loop of integrate field, what′s more the integral error can be passed. In addition the absolute measurement system is proposed. This system eliminates the shortcoming of PMD and it′s a key point to get equations by setting reasonable parameter.

李建欣, 朱荣刚, 崔艳军, 宋倩, 李金鹏, 朱日宏. 基于条纹反射的非球面测量及系统结构分析[J]. 光学学报, 2012, 32(s1): s112003. Li Jianxin, Zhu Ronggang, Cui Yanjun, Song Qian, Li Jinpeng, Zhu Rihong. Aspheric Surface Measurement Based on Fringe Reflection and Analysis of System′s Structure[J]. Acta Optica Sinica, 2012, 32(s1): s112003.

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