光学相干层析（OCT）是一种新型的光学信号获取与处理方式，它可以对光学散射介质进行扫描，获得的三维图像，分辨率可以达到微米级。尝试利用扫频光源OCT对在相同的制绒溶液配比下，不同制绒时间的单晶硅片进行检测，通过处理三维图像数据，判断制绒质量，为单晶硅制绒检测提供一种新方法。

Optical coherence tomography (OCT) is an novel optical signal acquisition and processing method which can capture micrometer-resolution three-dimensional images from optical scattering media. Monocrystalline silicon wafers obtained with different texturing time and same corrosion solution are measured by sweep light source OCT. Through processing the OCT acquired data, the quality of monocrystalline silicon in different texturing time can be estimated. It may provide a new method for the test of textured monocrystalline silicon.