提出一种基于激光自混合效应的加速度传感器，并介绍了该系统结构及工作原理，分析了分辨率的影响因素及影响机理。该传感器利用双挠性梁支撑的摆片作为第一级敏感元件。有加速度输入时，摆片在惯性力作用下产生与加速度成比的位移信号，引起激光器外腔长度变化，使得被锯齿波电流调制的激光器输出相位差随加速度变化的自混合干涉信号；采用全相位谱分析算法进行自混合干涉信号相位解调，重构位移曲线，进而获得加速度值。通过系统仿真模型验证了加速度传感系统的可行性。对加速度传感系统进行测试。实验结果表明，加速度传感器分辨率为0.19 μg。实验结果和理论分析相吻合，基于激光自混合效应的加速度传感器可实现高分辨率。

A novel acceleration sensor based on laser self-mixing interference is proposed. The structure and principle of the accelerometer are introduced. The influence of different factors on its resolution and their influencing mechanism are analyzed. The pendulous reed supported by dual flexible beam is used as the first step sensing unit. When an inertial force due to acceleration is applied in the pendulous reed, a displacement proportional to the acceleration occurrs to the pendulous reed, which changes the length of external cavity. The phase of self-mixing interference signals generated by laser which is modulated by sawtooth-wave current is a function of acceleration. All-phase spectrum analysis is applied to detect the phase of self-mixing interference signals to reconstruct the displacement of the pendulous reed and the acceleration. A simulation model of the acceleration sensor is established. The simulation results show that the scheme is feasible. Its performances are measured through experiments. Experimental results show that the resolution of the acceleration sensor is 0.19 μg, which consistant with the retical analysis. The acceleration sensor based on laser self-mixing interference can achieve a high resolution.