光电工程, 2013, 40 (1): 94, 网络出版: 2013-01-16
回转体测量机的双向法在线温度误差补偿
The Method of Online Thermal Error Compensation Based on the Bidirectional Measurement of Revolving Body Measuring Machines
回转体测量机 在线温度误差补偿 双向测量 平移和倾斜 revolving body measuring machines online thermal error compensation bidirectional measurement offset and tile parameters
摘要
回转体测量机以其效率高、精度高,在回转类零件测量中得到了广泛的应用。但是由于其自身的特点,测量精度受温度影响引起的漂移误差可达 120 μm。针对这一问题提出了一种在线温度误差补偿技术,通过双向法测量获得内外测量架的平移量和倾斜量,然后再对各高度的内外径值进行补偿。该方法计算简单,使用方便,并大幅度提高了测量精度。实验证明,这种补偿方法可以使尺寸测量结果的稳定性误差从 136 μm降低到 15 μm左右,大大提高了测量的稳定性。
Abstract
Revolving body measuring machine has been widely used in the measurement of revolving parts with its high efficiency and precision. However, due to its own characteristics, measurement accuracy is affected by the temperature and the drift error is up to 120 μm. In order to solve this problem, a method of online thermal error compensation was presented. The method can acquire the offset and tile parameters of the gauging spindle by using the bidirectional measurement, and then use these parameters to correct the diameter of each elevation. The method is simple and easy to use, and significantly improves the measurement accuracy. The experiments show that this compensation method allows the measurement results stability error of the size to reduce to about 15 μm from 136 μm. And the measurement stability is greatly improved.
李杏华, 洪燕. 回转体测量机的双向法在线温度误差补偿[J]. 光电工程, 2013, 40(1): 94. LI Xing-hua, HONG Yan. The Method of Online Thermal Error Compensation Based on the Bidirectional Measurement of Revolving Body Measuring Machines[J]. Opto-Electronic Engineering, 2013, 40(1): 94.