为减少光反射损失,通过热蒸发在织构单晶硅(经含有碱液和添加剂的特殊溶液80°C腐蚀30 min而成)表面上沉积了一定厚度的银膜后经一定温度(0～500°C)退火形成银纳米颗粒。SEM下观察到,银纳米颗粒的大小和形状与退火温度有很大关系。银纳米颗粒表现出的等离激元性质对反射谱有影响。实验分析得到, Ag沉积质量是0.003 8 g,400°C N2退火20 min时样品的反射率和反射率降低(REF<1)的波段达到最佳匹配。另外,金字塔上银纳米颗粒的均匀性与沉积的厚度有关。

Ag nanoparticles (NPs) has been fabricated by thermodynamic processing of silver film, which is annealed with the nanoparticles formed on the textured Si surface, which was etched in a peculiar kind of solution of alkali and additive agents(80℃, 30 min), in order to manage the reflective light. The size and shape effects with different Ag NPs were obviously dependent on the annealing temperature variations ranging from 0 to 500℃by SEM analysis. The plasmonic trapping of light associated with Ag NPs has an effect on reflectance spectrum. Based on analysis, the sample with 0.003 8 g Ag annealed at 400℃in N2 for 20 min is the best one due to the optimal match of the reflectivity and the wavelengths corresponding to REF<1. Further more, the homogeneity of Ag NPs on the pyramids is relative to the thickness of the deposition.