中国激光, 2003, 30 (s1): 140, 网络出版: 2013-01-29
三维曲面激光扫描光三角检测系统
3-D Curved Surface Profile Measuring System Using Laser Scanning Optical Triangulation
精密工程测量 三维曲面 光三角测量法 激光扫描 位置敏感器 precision engineering measurement 3-D curved surface optical triangulation method laser scanning position sensitive device (PSD)
摘要
基于激光三角测量原理和现代光电传感技术,提出了一种用于三维曲面轮廓测量的激光扫描光三角检测系统,其采用半导体激光测头,并与二维光栅位移检测系统和伺服控制系统相结合,实现了对被测曲面的多点扫描,通过计算机实时数据处理,给出了被测曲面的轮廓。介绍了系统的测量原理和总体结构,详细讨论了半导体激光测头、光栅位移检测系统和计算机实时控制与数据处理系统,并对系统的测量精度进行了分析。
Abstract
Based on the principle of laser triangulation and the technology of modern photoelectric sensor, a laser scanning optical triangulation measuring system which is used to measure 3-D curved surface profile is presented. The system uses a semiconductor laser probe, and combines with 2-D grating displacement measuring systems and servo-control systems to realize scaiming several points of measured curved surface. Through the data processing in real time by using the computer, the profile of measured curved surface is given. The measuring principle of system, and design of overall structure are introduced in this paper. And the semiconductor laser probe, grating displacement-measuring system, real-time control and data processing system by the computer are discussed in detail. The measuring accuracy of the system is analyzed.
张国玉, 徐熙平, 宋甲午, 杨琳, 李成志, 安志勇. 三维曲面激光扫描光三角检测系统[J]. 中国激光, 2003, 30(s1): 140. ZHANG Guo-yu, XU Xi-ping, SONG Jia-wu, YANG Lin, LI Cheng-zhi, AN Zhi-yong. 3-D Curved Surface Profile Measuring System Using Laser Scanning Optical Triangulation[J]. Chinese Journal of Lasers, 2003, 30(s1): 140.