中国激光, 2013, 40 (3): 0308009, 网络出版: 2013-02-01   

机械刻划光栅的刻线弯曲与位置误差对平面光栅性能影响及其修正方法

Influence and Revising Method of Machine-Ruling Grating Line′s Curve Error, Location Error on Plane Grating′ Performance
作者单位
1 中国科学院长春光学精密机械与物理研究所, 吉林 长春 130033
2 中国科学院大学, 北京 100049
摘要
机械刻划法是制作平面光栅的重要方法之一。深入分析了机械刻划光栅的等间距刻线弯曲和刻线位置误差对平面光栅分辨本领和杂散光等光谱性能的影响,对改善光栅质量和提高应用水平有重要的意义。根据费马原理,建立了单色平行光入射、含有刻线弯曲和刻线位置误差的平面光栅在焦平面上成像的光线追迹数学模型,研究了上述两种刻线误差对光栅光谱性能的影响。结果表明,刻线弯曲和刻线位置误差分别主要影响光栅弧矢和子午方向光谱性能,刻线弯曲对光栅分辨本领和杂散光影响较小。据此对光栅刻划机刻划系统进行了修正。修正后的刻划系统产生的刻线位置误差的统计平均值降低至原有幅值的一半以下,从而有效抑制了光栅杂散光。
Abstract
Machine-ruling method is one of the important methods for making plane grating. In order to improve the grating′s performance and application level, it is particularly important to analysis the influence of ruling line′s equal-distance curve and location error on plane grating performance, such as resolution, scattered light, etc. According to Fermat principle, a light-tracing mathematical model that simulates collimated monochromatic light incident on a plane grating which contains line′s curved error, and location error and corresponding diffraction light imaged on the focal plane is established. The influence of above-mentioned grating line errors on grating performance is studied. Results show that grating line′s curve and location error mainly influence grating sagittal and meridional spectral performance, separately, line′s curved error has little effect on grating resolving power and scattered light. According to the analysis above, the ruling system of grating ruling machine is improved. Statistical average value of grating line′s location error caused by modified ruling system is reduced to less than half of the original amplitude. Thereby grating scattered light is effectively suppressed.

李晓天, 巴音贺希格, 齐向东, 于海利, 唐玉国. 机械刻划光栅的刻线弯曲与位置误差对平面光栅性能影响及其修正方法[J]. 中国激光, 2013, 40(3): 0308009. Li Xiaotian, Bayanheshig, Qi Xiangdong, Yu Haili, Tang Yuguo. Influence and Revising Method of Machine-Ruling Grating Line′s Curve Error, Location Error on Plane Grating′ Performance[J]. Chinese Journal of Lasers, 2013, 40(3): 0308009.

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