中国激光, 2002, 29 (s1): 491, 网络出版: 2013-02-23  

热氧化制备纳米氧化锌薄膜的光致发光特性研究

Study of Luminescence Characterization on Nanocrystalline ZnO Thin Films Prepared by Thermal Oxidation of ZnS Thin Films
作者单位
1 中国科学院长春光学精密机械与物理研究所激发态重点实验室, 长春 130021
2 哈尔滨师范大学物理系, 哈尔滨 150080
摘要
报道了利用低压金属有机汽相外延(LP-MOCVD)工艺首先在硅(n-Si衬底上生长硫化锌(ZnS)薄膜,然后将 硫化锌薄膜在氧气中于不同温度下进行热氧化,制备高质量的纳米氧化锌(ZnO)薄膜。X射线衍射(XRD)结果表明,氧化锌具有六角纤锌矿型结构且具有择优(002)取向。在900 ℃退火的样品的光致发光(PL)中, 观察到一束强 的380 nm紫外光致发光和相当弱的深能级发射。紫外发光强度与深能级发射强度之比是28,表明纳米ZnO薄膜的高质量结晶。
Abstract
In this paper, high quality nanocrystalline ZnO film has been prepared by using thermal oxidation of ZnS thin film, which was grown on a Si substrate by the low pressure metalorganic chemical vapor deposition (LP-MOCVD) technique. The X-ray diffraction (XRD) patterns show that ZnO thin film has a hexagonal wurtzite structure with preferred (002) orientation. In photoluminescence (PL) measurements, a strong PL with a full width at half maximum (FWHM) of 10 nm (88 meV) around 380 nm at room temperature was observed from the samples annealed at 900 ℃. The PL intensity ratio of the UV emission to the deep-level emission is 28 at room temperature, providing evidence of the high quality of the nanocrystalline ZnO films.

张喜田, 刘益春, 马剑钢, 张吉英, 申德振, 许武, 钟国柱, 范希武. 热氧化制备纳米氧化锌薄膜的光致发光特性研究[J]. 中国激光, 2002, 29(s1): 491. ZHANG Xi-tian, LIU Yi-chun, MA Jian-gang, ZHANG Ji-ying, SHEN De-zhen, XU Wu, ZHONG Gou-zhu, Fan Xi-wu. Study of Luminescence Characterization on Nanocrystalline ZnO Thin Films Prepared by Thermal Oxidation of ZnS Thin Films[J]. Chinese Journal of Lasers, 2002, 29(s1): 491.

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