采用微机电系统微镜阵列和倾斜反射镜替代传统傅里叶变换光谱仪的动镜系统, 提出一种基于微机电系统微镜阵列的新型傅里叶变换光谱仪.介绍了该光谱仪的工作原理, 分析了倾斜反射镜倾斜角度的容限范围, 并搭建了实验系统, 进行了实验验证.理论推导表明: 在近红外区域, 反射镜倾角理论最大值为0.52°, 光谱分辨率达到8 nm; 在可见光区域, 反射镜倾角理论最大值0.183°, 光谱分辨率达到3 nm.选取可见光源488 nm激光器进行的实验验证结果表明: 在倾角容限范围之内, 光谱能准确还原; 反之, 光谱严重失真.最终, 采用复色光源进一步实验验证了理论分析的正确性.

Equipped with a tilt mirror and micro-mirror replacing the moving mirror, a novel Fourier transform spectrometer is proposed based on programmable Micro-Electro-Mechanical Systems(MEMS) micro-mirror. Firstly, the working principle and the tolerance of the tilting mirror is analyzed systematically and validated experimentally. Theory results show that the limited tilt angle is 0.52° and the spectrum resolution is 8 nm in the near infrared region; while the limited tilt angle is 0.183°, the spectrum resolution is 3 nm in the visible region. Experimental measurement shows that the spectra can be reconstructed accurately in the tolerance of the tilting mirror with central wavelength 488 nm laser soure and polychromatic light soure, while distorted badly out of the tolerance range.