为了满足工业用振荡-放大双腔结构的准分子激光器放电激励技术的要求, 设计了高重频高精度的脉冲充电电源。该电源采用LC谐振倍压的方式, 同时为双腔准分子激光器的充电电容器进行充电, 倍压比为1.87。通过对电源工作时序的调节, 实现千赫兹高重频放电激励, 在电源输出电压约为1300V时, 充电电压精度为±0.18%。结果表明, 通过充电电压精度控制单元, 对充电电压反馈调节, 可以实现充电电压的高精度。

In order to satisfy the exciting technique of a master oscillator power amplifier(MOPA) excimer laser for industrial use, a high-repetition and high-accuracy pulse charge power was designed. The power can simultaneously charge the charging capacitors for the dual chamber excimer laser with a LC resonant circuit with a voltage ratio of 1.87. By regulating the work schedule, the power can discharge at kHz level frequency. When the output voltage was about 1300V, the voltage precision was±0.18%. The charging voltage can be controlled at high accuracy by the voltage feedback regulation.