首页 > 论文 > 光学技术 > 39卷 > 2期(pp:103-111)

小口径非球面加工技术及装备综述

Review of machining technology and equipment for small aspheric surface

  • 摘要
  • 论文信息
  • 参考文献
  • 被引情况
  • PDF全文
分享:

摘要

小口径非球面零件是一种非常重要的光学零件。介绍了国内外小口径非球面超精密加工技术的发展现状和装备。对单点金刚石车削、超精密磨削、透镜成型、超精密铣削和特种加工技术进行了综述。指出了小口径非球面加工的发展趋势和产业化需要解决的问题。

Abstract

Micro aspherical part is an important optical component. The developing status and equipment of ultraprecision machining technology for micro aspheric surface are introduced. Single point diamond turning,ultra-precision grinding,moulding of lens,ultra-precision milling and non-traditional machining technology are reviewed.Its developing trends are summarized.Problems of the industrialization are proposed.

Newport宣传-MKS新实验室计划
补充资料

中图分类号:TH706

所属栏目:光学工艺

基金项目:江苏省科技计划项目(BE2011053); 国际科技合作项目(2012DFG70640); 中央高校基本科研费资助

收稿日期:2012-08-16

修改稿日期:2012-11-21

网络出版日期:--

作者单位    点击查看

尹韶辉:湖南大学 国家高效磨削工程技术研究中心, 湖南 长沙 410082
张乐贤:湖南大学 国家高效磨削工程技术研究中心, 湖南 长沙 410082
陈逢军:湖南大学 国家高效磨削工程技术研究中心, 湖南 长沙 410082
余剑武:湖南大学 国家高效磨削工程技术研究中心, 湖南 长沙 410082

联系人作者:张乐贤(zhanglexian110@126.com)

备注:尹韶辉(1967-), 男, 教授, 博士, 主要从事纳米制造、超精密加工、超微细加工和超高速加工方面的研究。

【1】庞长涛, 罗松保.非球面加工先进技术[J].航空精密制造技术, 2001,37(3): 1-5.
Pang Changtao,Luo Songbao. Advanced Aspheric Surface Mac-hining Technology[J].AVIATION PRECISION MANUFACTURING TECHNOLOGY,2001,37(3):1-5.

【2】罗松保, 张建明.非球面曲面光学零件超精密加工装备与技术[J].光学 精密工程, 2003,11(1): 75-78.
LUO Song-bao, ZHANG Jian-ming. Ultraprecision machining e-guipment and technology of aspheric optic[J]. Optics and Precision Engineering,2003,11(1):75-78.

【3】Ji Wang Yan,Junichi Tamaki, Katsuo Syoji,et al. Development of a novel ductile-machining system for fabricating axisymmetric aspheric surfaces on brittle materials[J]. Key Engineering Materials, 2003,238-239:43-48.

【4】Yan J,SHOJIKATSUO, KURIYAGAWA TSUNEMOTO. Fabrication of large-diameter single-crystal silicon aspheric lens by straight-line enveloping diamond-turning method[J]. Journal of the Japan Society of Precision Engineering, 2002, 68 (4):561-565.

【5】Wenda Jiang. Diamond turning aspheric projector mirrors[C]∥Proceedings of the SPIE. 2007:227-250.

【6】Chun Chieh Chen, Choung Lii Chao, Wei Yao Hsu, et al.Fabri-cation of aspheric micro lens array by slow tool servo[J].Adva-nced Materials Research,2009,76-78:479-484.

【7】张效栋, 房丰洲, 程颖, 等. 复杂非球面镜高效超精密车削加工法[J].纳米技术与精密工程, 2010,8(4):346-351.
Zhang Xiao-Dong, Fang Feng-Zhou, Cheng Ying, et al. High-efficiency ultra-precision turning for complex aspheric mirrors[J]. Nanotechnology and Precision Engineering, 2010, 8(4):346-351.

【8】Han Cheng Shun, Zhang Long Jiang, Dong Shen. Research on mathematical models of new diamond turning for nonaxisymme tric aspheric mirrors[J]. Key Engineering Materials, 2008, 364-366:35-38.

【9】Suzuki, Hirofumi, et al. Study on ultra-precision grinding of mi-cro aspherical surface (3rd Report)-micronizing of aspherical surface in inclined rotational grinding[J].Seimitsu Kogaku Kais-hi,1998,64 (9):1350-1354.

【10】Hu Jianjun,Pan Junhua. Further application and amelioration ofa novel CNC aspheric grinding machine[J].Proceedings of SPIE, 2006,6149:614-690.

【11】李立军,张飞虎,董申.非球面平行法磨削技术研究[J].机械工程师, 2007,(1):31-32.
LI Li-jun,ZHANG Fei-hu,DONG Shen.Research on Parallel Gri-nding Technigue of Aspheric Optics[J].MECHANICAL ENGIN-EER,2007,(1):31-32.

【12】LJ Li,FeiHu Zhang,S Dong. Development of parallel grinding system of aspheric optics[J]. Key Engineering Materials, 2007,339:365-370

【13】陈逢军,尹韶辉,范玉峰,等.一种非球面超精密单点磨削与形状误差补偿技术[J].机械工程学报,2010,46(23):186-191.
CHEN Fengjun, Yin Shaohui,Fan Yufeng,et al. Ultra-precision Single-point Grinding Technique and Profile Error Compensation Method forMachining Aspheric Mould[J].JOURNAL OF MECHANICAL E-NGINEERING,2010,46(23):186-191.

【14】仇中军,张飞虎,谢大纲.应用ELID 技术进行微晶玻璃超精密磨削[J].金刚石与磨料磨具工程,2002,(1):36-39.
QIU Zhongjun, Zhang Feihu, Xie Dagang. Ultra-precision Grin-ding of Glass-Ceramic by Applying ELID Technique[J]. DIAM-OND&ABRASIVES ENGINEERING,2002,(1):36-39.

【15】袁哲俊.精密与超精密加工技术[M].北京: 机械工业出版社,2010.

【16】M Sazedur Rahman, T Saleh, H S Lim, et al. Development of an on-machine profile measurement system in ELID grinding for machining aspheric surface with software compensation[J]. International Journal of Machine Tools and Manufacture, 2008,48(7-8):887-895.

【17】FeiHu Zhang,L J Li, S Dong. Surface quality improvement of aspheric pressing mould using parallel grinding method[J]. Key Engineering Materials, 2005,291-292:133-138.

【18】Mingjun Chen, Feihu Zhang, Qingliang Zhao, et al. Study on ultra-precision grinding machining of optical aspheric surface in ductile mode[J]. Proceedings of the SPIE, 2001, 4451:191-199.

【19】尹韶辉,陈逢军,张导成,等.结合ELID磨削与磁流变光整加工的单晶硅反射镜超精密制造技术[J].纳米技术与精密工程,2007,5(3):220-223.
YIN Shao-hui, CHEN Feng-jun, Zhang Dao-cheng, et al. Nan-oPrecision Finishing Process Integrated with ELID-Grinding andMRF for Silicon Mirror[J]. Nanotechnology and Precision E-ngineering,2007,5(3):220-223.

【20】Yuji YAMAMOTO, Hirofumi SUZUKI, Toshimichi MORIWAKI,et al. Precision Grinding of Micro Fresnel Lens Molding Die (2nd Report)- Precision Truing of Micro Grinding Wheel with Sharp Edge by Molybdenum Truer and Accuracy Improvement in Fresnel Surface Grinding[J].Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering,2007,73(6):688- 692.

【21】木村中国全球工业品供应商[EB/OL].http://www.ttt-1.com/s02/pr-oduct/2011/12/21/1280637.html,2011-12-21/2012-5-20.

【22】AMETEK Precitech [EB/OL].http://www.precitech.com/product-overview/application-reports/,2012/2012-5-20.

【23】周旭升, 戴一帆, 李圣怡,等. 非球面加工机床的设计[J].制造技术与机床, 2004, (5):55-57.
ZHOU Xusheng, DAI Yifan, LI Shengyi,et al.Design of An Aspheric Surface MachineTool[J].MANUFACTURING TECHNOLOGY & MACHINE TOOL,2004,(5):55-57.

【24】吴呼玲.高精度非球面光学塑料透镜成型法的探索[J].兰州工业高等技术专科学校学报,2007,14(1):25-27.
WU Hu-ling. Explore Shaping Method of High Accuracy Asph-erical Optics Plastic Lenses[J].Journal of Lanzhou Polytechnic College, 2007,14(1):25-27.

【25】Maryama T, Takagi M, Noro Y, et al.Zoom lens systems with aspherical plastic lens[J].IEEE Transactions on Consumer Electronics,1987,(3):256-266.

【26】Park Keun, Joo Wonjong. Numerical evaluation of a plastic lens by coupling injection molding analysis with optical simulation[J]. Japanese Journal of Applied Physics, 2008, 47(11):802-807.

【27】邓雄.光学零件微结构注塑成型工艺研究[D].长沙: 国防科学技术大学, 2010.
Deng Xiong.Research on Process in Injection Molding of Microstructures in Optical Components [D]. Changsha: National Uni-versity of Defense Technology,2010.

【28】雄戈.智能化全电动注塑机[J].国外塑料,2009,27(4):77.
Xiong Ge. Enhanced All-Electrics and new Six-Axis robot[J]. World Plastics,2009,27(4):77.

【29】尹韶辉, 王玉方, 朱科军,等.微小非球面玻璃透镜超精密模压成型数值模拟[J].光子学报, 2010,39(11):2020-2024.
Yin Shao-hui,Wang Yu-fang,Zhu Ke-jun,et al.Numerical Simulat-ion of Ultraprecision Glass Molding for Micro Aspherical Gla-ss Lens[J]. ACTA PHOTONICA SINICA,2010,39(11):2020-2024.

【30】Tianfeng Zhou, Jiwang Yan, et al. Study on Nonisothermal Gla-ss Molding Press for Aspherical Lens [J]. Journal of AdvancedMechanical Design, Systems and Manufacturing,2010,4(5):806-815.

【31】Deegan John. Glass molding makes aspheric lenses a practical choice [J].Photonics Spectra, 2007, 41(8):72-74.

【32】Xiaohu Zheng, et al. Research on the Edge Design Precision PCD Thread Milling Tool[J].Solid State Phenomena,2011,175:311-315.

【33】H Suzuki, T Moriwaki, Y Yamamoto, et al. Precision Cutting of Aspherical Ceramic Molds with Micro PCD Milling Tool[J].CC-IR Annals-Manufacturing Technology, 2005,50(1):131-134.

【34】Kuriyagawa T, Saeki M, Syoji K. Study of electrorheological fluid-assisted ultra-precision polishing for 3-dimensional small parts, Proceedings of the euspen[C]∥ 2nd International Conference. 2001:738-741.

【35】T Kuriyagawa, M Saeki, K Syoji. Electrorheological fluid-assisted ultra-precision polishing for small three-dimensional parts[J]. Original Research Article Precision Engineering, 2002, 26(4):370-380.

【36】Lee J J, Lee E S, Min S K, et al. Micro-polishing of complex and flat parts using a chemical oil based ER fluid[J]. Key Engineering Materials, 2004,257-258:477-482.

【37】张雷, 贺新升, 张莹,等. 新型电流变抛光工具开发及其抛光实验[J]. 吉林大学学报: 工学版, 2010,40(04):1009-1014.
ZHANG Lei, HE Xinsheng, ZHANG Ying, et al. Development of new tipe ER fluidassisted polishing tool and its polishing experiment[J]. Journal of Jilin University: Engineering and Technology Edition,2010,40(04):1009-1014.

【38】Naniwa I, Kanamaru M, Nakamura S, et al. Fabrication of Aspheric Micro-Lens Mold with High Aspect Ratio - Method to Form Small 3D Structures with an Arbitrary Aspheric Surface and High Aspect Ratio[J]. Transactions of the Institute of Electrical Engineers of Japan, 2009,129(11):426-9.

【39】De Lima Monteiro D W, Akhzar-Mehr O, Sarro P M. Single-mask microfabrication of aspherical optics using KOH anisotropic etching of Si[J]. Optics Express, 2003, 18(11): 2244-2252.

【40】石峰,戴一凡,彭小强,等.磁流变抛光消除磨削亚表面损伤层新工艺[J].光学 精密工程,2010,18(1):162-168.
SHI Feng,DAI Yi-fan,PENG Xiao-qiang,et al. Removal of subs-urface damage in grinding by magnetorheological finishing[J]. OPTICS AND PRECISION ENGINEERING,2010,18(1):162-168.

【41】H B Cheng, Z J Feng, Y B Wu. Process technology of asphericalmirrors manufacturing with magnetorheological finishing[J]. Materials Science Forum,2004,471-472:6-10.

【42】PENG Xiao-qiang,DAI Yi-fan,Li Sheng-yi,et al. Dwell time a-lgorithm for MRF of axis-symmetrical aspherical parts[J]. Journal of National University of Defense Technology,2004,26:89-92.

【43】QED Technology [EB/OL].http://www.qedmrf.com/polishing/products/q22-xe,2012/2012-05-20.V

【44】尹韶辉, 大森整, 林伟民,等.一种光学材料高效超精密加工方法[J].中国机械工程, 2008,19(21):2540-2544.
Yin Shaohui,Ohmori Hitosh,Lin Weimin,et al. A High Efficient Ultra-precision Synergistic Finishing Process for Optical Mate-rials[J]. CHINA MECHANICAL ENGINEERING,2008,19(21):2540-2544.

引用该论文

YIN Shaohui,ZHANG Lexian,CHEN Fengjun,YU Jianwu. Review of machining technology and equipment for small aspheric surface[J]. Optical Technique, 2013, 39(2): 103-111

尹韶辉,张乐贤,陈逢军,余剑武. 小口径非球面加工技术及装备综述[J]. 光学技术, 2013, 39(2): 103-111

被引情况

【1】郑 翔,赵柏秦. 用于周向探测的均匀配光非球面柱透镜设计. 光学学报, 2017, 37(5): 522003--1

您的浏览器不支持PDF插件,请使用最新的(Chrome/Fire Fox等)浏览器.或者您还可以点击此处下载该论文PDF