基于LiNbO3晶体垂直表面输出技术，设计了一台小型化外腔THz参量振荡器。利用小型化灯1064 nm脉冲激光器泵浦MgO:LiNbO3，通过优化设计三波非共线相位匹配的光学参量振荡腔结构，实现THz垂直晶体表面输出，减少LiNbO3晶体对THz波的吸收，提高了THz波输出光束质量。当在泵浦光能量为128 mJ、重复频率为10 Hz时，获得THz波的调谐范围为0.69~3.01 THz，在1.6 THz处获得THz波最大平均功率为10.8 μW，脉冲宽度为10 ns，对应THz波能量转换效率为8.43×10-6。

A miniature extracavity terahertz(THz) parametric oscillator is proposed based on surface-emitted technology. Using a small sized pulsed laser to pump MgO:LiNbO3 crystal, the THz-wave is emitted perpendicularly to the crystal surface by optimization design of three-wave non-collinear phase-matching optical parametric oscillation structure. This configuration can reduce the absorption of the THz-wave and improve the beam quality. The THz-wave can be tuned from 0.69 THz to 3.01 THz. When the pump energy is 128 mJ, the maximum average power of the THz-wave is 10.8 μW at 1.6 THz , corresponding to an energy conversion efficiency of 8.43×10-6. This room-temperature-operated, miniature system is suited to a variety of applications such as spectral analysis and THz communications.