分析了不同宽边情况下对滤波器加工精度的影响，分析结果表明对于不同频段的滤波器，需要选择合适的谐振腔的宽边才能达到较好的性能，同时分析了不同谐振模式的滤波器对加工精度的影响，分析表明，对于太赫兹频段滤波器，选用TE101谐振模式时存在腔体长度会比波导的宽边小很多的情况，而选用高阶谐振模式不但可以提高滤波器的品质因数Q值，减少损耗，同时也能在一定程度上降低滤波器对加工精度的要求。最后以0.34 THz 4阶带通滤波器为例验证此方法的正确性，测试表明该滤波器最低损耗为-0.73 dB，在0.335~0.349 THz范围内损耗在-2 dB以内。

Tolerance analysis of a filter with different cavity widths is presented, showing that different widths should be used for filters in different frequency bands in order to degrade manufacturing tolerance. Moreover, the effect of various resonant modes is also analyzed. It is found that in terahertz, the cavity length of TE101 mode is smaller than the width of the cavity, and in this case higher resonant modes should be used to increase the Q factor and degrade the tolerance of manufacturing. A 4th order 0.34 THz band pass filter is illustrated. Its measurement shows that the minimum loss is -0.73 dB and all loss is within -2 dB in the frequency range of 0.335 THz to 0.349 THz.