提出一种垂直扫描白光干涉信号的计算机快速模拟方法。该方法考虑到白光光源光谱分布及垂直扫描干涉系统对白光干涉信号的影响, 通过正弦函数多项式拟合的方式减少模拟算法的运算量, 消除了现有方法中数值积分运算量大, 不便于实际分析的缺点。采用白光LED作为光源, 用该方法对白光干涉信号进行模拟分析, 并用直接数值积分信号模拟结果与白光干涉垂直扫描测量装置获得的实测信号进行对比, 验证了该方法的准确性。

A computationally efficient method is presented to simulate the interference signal for vertical scanning interferometry. The existing models are either over-simplified or computational intensive, which are not practical for actual analysis. The proposed method takes the light source spectrum and interference setting impact into consideration. It eliminates the heavy computation burden produced by numerical integration by modeling the light spectrum as a sum of sin functions. To verify the accuracy of the method, experiments on the vertical scanning interferometry based on white light LED are conducted. The experimental datum and results are contrasted by direct numerical integration method.