作为强激光系统的终端组件之一，光束采样光栅是制作在熔石英基底上的浅槽光栅。利用熔石英的传统化学机械抛光技术，修正熔石英光束采样光栅的槽型轮廓，降低局部偏高的衍射效率，以提高光束采样光栅的整体效率均匀性。利用此方法已成功将430 mm×430 mm的光束采样光栅的衍射效率均方根值(RMS)由30%附近降低到5%以下。实验结果显示，利用传统化学机械抛光技术可以有效提高光束采样光栅衍射效率均匀性，这是一种可行的技术方案。

As one element of final assembly in high-power laser systems, beam sampling grating (BSG) is a fused silica grating with shallow depths. In order to improve the uniformity of diffraction efficiency of a BSG, a classical chemical mechanical polishing technique of fused silica, with CeO2 as the polishing material, is proposed for BSG to modify its profile and efficiency. With this method, the efficiency root mean square of a BSG with an aperture of 430 mm × 430 mm can be reduced from nearly 30% to less than 5%, which shows that the CeO2 polishing is a feasible and effective method to improve the efficiency uniformity of BSG.