研制一套同时具有时间分辨及空间分辨能力的超快电子衍射(UED)系统，理论时间分辨能力达到300 fs，空间分辨能力160 lp/mm，并对该系统进行了静态性能分析。实验表明，优化后系统电子束直径约为300 μm，电子打靶角度约为0.09°，同时对x和y偏转板的灵敏度、电子束斑尺寸及位置稳定性进行定量分析,利用该系统进行多晶铝膜电子衍射实验，分析衍射图样表明系统最小可以分辨单个晶格间距的0.36%。

An ultrafast electron diffraction system with both ultrafast temporal resolution and ultrahigh spatial resolution was established. The temporal resolution of the system is 300 fs and spatial resolution 160 lp/mm in theory.Investigation and optimization on spatial resolution of the system was performed. The experimental results demonstrate that the system can provide an electron beam diameter less than 300 μm and an incidence angle less than 0.09°. The x-y deflection plates and stability of the electron beam were quantitatively analyzed. The diffraction pattern of Al was obtained by this system and it demonstrates that the system can distinguish diffraction peak position changes of 0.36%.