针对光学元件损伤图像中损伤区域的高精度检测问题，对内全反射照明下光学元件损伤图像的处理技术进行了研究。根据在线检测图像中损伤区域中心峰值的信号强度高于局部背景的信号强度这一特点，利用高斯滤波器生成待检测图像的局部信号强度比图像，实现了对损伤区域的低漏检率自动定位; 根据CCD的成像原理，利用辐射标定的方法建立起损伤区域的尺寸与其在图像中总灰度的关系方程，实现了损伤区域的亚像素高精度尺寸测量。实验结果表明，与传统的光学元件损伤图像处理算法相比，本文提出的算法在保持低漏检率的同时大大提高了损伤区域的测量精度。

Images progressing technology of optics damage pictures which were taken in total internal reflection edge illumination was studied in this paper. Signal intensity of defects is stronger than background’s intensity in the edge lit images. Based on this property, local signal intensity ratio image was produced by Gaussian filter to locate the defects with high accuracy. A calibration equation between the size of the defects and the gray value was built. The size of the defects could be precisely calculated using the calibration equation. A comparison test was carried out, the results indicate that the proposed algorithm is superior to the traditional ones on the precision.