首页 > 论文 > 激光技术 > 37卷 > 4期(pp:478-482)

超短激光脉冲序列烧蚀镍薄膜的研究

Study on ablation of Ni film by ultrashort laser pulse-train

  • 摘要
  • 论文信息
  • 参考文献
  • 被引情况
  • PDF全文
分享:

摘要

超短(飞秒)激光脉冲序列技术能有效地提高激光加工金属的加工精度,它在微/纳制造中具有重要的理论意义和生产价值。为了研究脉冲间隔对激光烧蚀金属加工精度的影响,以过渡金属镍为研究对象,采用双温模型和分子动力学模拟相结合的方法,对飞秒激光脉冲序列(脉冲间隔不同)烧蚀金属镍的过程、现象进行了研究,取得了脉冲序列烧蚀镍薄膜的动态表层电子温度和晶格温度随时间演化的数据和烧蚀区域在不同时刻的快照。结果表明,一定范围内,随着脉冲间隔的增加,脉冲序列烧蚀镍薄膜所产生的纳米粒子更加均匀,烧蚀平面更加平整,初始熔化速度、烧蚀率呈降低趋势,有利于提高加工的精度。

Abstract

Micromaching by ultrashort laser pulse-train can effectively improve femtosecond laser ablation of metal, which are important both theoretically and practically in micro/nano-laser fabrication applications. In order to study the effect of separation of pulse on the accuracy of laser ablation, the phenomena and process of laser ablation with different separation of pulse train were studied in detail by combining the molecular dynamic simulation and two-temperature model, the electron and lattice temperatures of the layers next to dynamic film surfaces and the snapshots of nickel thin films irradiated by the femtosecond laser pulse trains were obtained. The result is that ,within a certain range, as the increase of the separation of pulse, femtosecond pulse train laser ablation of Ni films can apparently cause more flat ablation plane, slower initial melting speed, smaller and more uniform nanoparticles, smaller ablation ratio,which can effectively improve femtosecond laser ablation of metal.

Newport宣传-MKS新实验室计划
补充资料

中图分类号:TB43

DOI:10.7510/jgjs.issn.1001-3806.2013.04.014

所属栏目:激光与光电子技术应用

收稿日期:2012-08-21

修改稿日期:2012-10-29

网络出版日期:--

作者单位    点击查看

韩飞:北京航星机器制造公司,北京 100013
闫寒:北京航星机器制造公司,北京 100013
周海波:北京航星机器制造公司,北京 100013
王琼娥:北京航星机器制造公司,北京 100013

联系人作者:韩飞(hanfei0604@yahoo.com.cn)

备注:韩飞(1985-),男,硕士,工程师,现主要从事激光微纳制造的研究。

【1】GONG J X, ZHAO X M, XING Q R, et al. Femtosecond laser-induced cell fusion[J]. Applied Physics Letters,2008,92(9):093901.

【2】NAKATA Y, OKADA T, MAEDA M. Micromachining of a thin film by laser ablation using femtosecond laser with masks[J]. Optics and Lasers in Engineering, 2004, V42(4): 389-393.

【3】JIANG L, TSAI H L. Repeatable nanostructures in dielectrics by femtosecond laser pulse trains[J]. Applied Physics Letters, 2005, 87(15): 151104.

【4】VURTH L, STEPHAN O, VITRANT G. Two-photon induced fabrication of gold microstructures in polystyrene sulfonate thin films using a ruthenium(Ⅱ) dye as photoinitiator[J]. Applied Physics Letters, 2008, 92(17): 171103.

【5】IVANOV D S, ZHIGILEI L V. Combined atomistic-continuum modeling of short-pulse laser melting and disintegration of metal films[J]. Physical Review,2003,B68(6): 064114.

【6】SCHOENLEIN R W, LIN W Z, ESLEY G L. Femtosecond studies of nonequilibrium electronic processes in metals[J]. Physical Review Letters,1987, 58(16): 1680-1683.

【7】HOHLFELD J, WELLERSHOFF S S, GUDDE J, et al. Electron and lattice dynamics following optical excitation of metals[J]. Chemical Physics, 2000, 251(1/3): 237-258.

【8】ANISIMOV S I, KAPELIOVICH B L, PERELMAN T L. Electron emission from metal sufaces exposed to ultrashort laser pulses[J]. Soviet Physics, 1974, 39(13):375-377.

引用该论文

HAN Fei,YAN Han,ZHOU Hai-bo,WANG Qiong-e. Study on ablation of Ni film by ultrashort laser pulse-train[J]. Laser Technology, 2013, 37(4): 478-482

韩飞,闫寒,周海波,王琼娥. 超短激光脉冲序列烧蚀镍薄膜的研究[J]. 激光技术, 2013, 37(4): 478-482

被引情况

【1】邵俊峰,郭劲,王挺峰. 飞秒双脉冲激光照射金属薄膜的热行为. 强激光与粒子束, 2014, 26(9): 91017--1

您的浏览器不支持PDF插件,请使用最新的(Chrome/Fire Fox等)浏览器.或者您还可以点击此处下载该论文PDF