光刻机光瞳整形普遍采用衍射光学元件(DOE)来产生各种照明模式。针对其光学特性的检测需求，提出了一种光刻机光瞳整形DOE远场多参数检测方法。该方法通过对远场光强分布进行转换，可同时获得DOE远场衍射图样的极平衡性、极张角、极方位角、半孔径角和径向光强分布等多种光学特性参数。实验中，对国外加工的产生四极照明模式的DOE进行了远场多参数检测与分析，结果表明该方法可以满足光刻机光瞳整形DOE的检测要求。

Diffractive optical element (DOE) is widely used to generate various illumination modes for pupil shaping in the lithography system. A far-field multi-parameter measuring method for the DOE is proposed according to its testing requirements of optical performance. The multi-parameters of optical performance, such as the pole balance, the pole opening angle, the pole azimuth angle, the semi-aperture angle, and the radial intensity distribution are obtained simultaneously by converting the far-field intensity distribution. The multi-parameter measurement and analysis of DOE made abroad are done experimentally. And the experimental results indicate that this measuring method can be applied to the testing of DOE for pupil shaping in the lithography system.