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Engineering localized hotspot both in transversal and longitudinal direction by plasmonic coupling between nano-particles and reflective metallic film

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Abstract

A structure which consists of photoresist film sandwiched by Ag nano-particle and metal film is proposed to modify localized hotspot both in transversal and longitudinal direction. It shows that there is strong plasmonic coupling between Ag nano-particle and metallic surface, which helps to reduce the width and elongate the depth of the plasmonic hotspot localized inside photoresist film. And that fringes and side lobes around hotspots can be effective attenuated by bottom-side illumination. Influences of illumination, particles inter-space, and polarization are also studied. The method opens avenue for the potential applications such as lithography, optical storage, etc.

Newport宣传-MKS新实验室计划
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DOI:10.3788/col201311.s22401

所属栏目:Optics at surfaces

责任编辑:张雁

收稿日期:2013-03-02

录用日期:2013-03-20

网络出版日期:2013-08-25

联系人作者:联系作者(lxg@ioe.ac.cn)

备注:This work was supported by the National "973" Program of China (No. 2011CB301800) and the National Natural Science Foundation of China (No. 61138002).

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引用该论文

Jie Zhou, Jing Zhang, Changtao Wang, Zeyu Zhao, Jiayu He, Xing Tao, Xiangang Luo, "Engineering localized hotspot both in transversal and longitudinal direction by plasmonic coupling between nano-particles and reflective metallic film," Chinese Optics Letters 11(s2), S22401 (2013)

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