研究了一种高温质子交换制备铌酸锂光波导的工艺技术,质子源是稀释的苯甲酸熔融液,通过提高蒸气压的方法实现了350 ℃质子交换,X线衍射测试表明波导层具有单纯的α相结构。采用该技术实验制备了铌酸锂Y分支波导,报告了波导单模特性的测试判断方法,研究了控制波导单模传输的工艺环节。测试表明,试制样品在1 310 nm和1 550 nm波长下具有良好的单模传输特性。

Experimental research of a high-temperature proton-exchanged LiNbO3 optical waveguide fabrication technology is carried out. The proton exchange source is diluted benzoic acid. The proton exchange at 350 ℃ is achieved by a process of improving the vapor pressure. The X-ray diffraction measurements show that the waveguide layer is uniform α-phase structure. LiNbO3 Y-branch waveguide is fabricated with this technology. The waveguide single-mode characteristic test judgment method and the technology concerning the controlling of waveguide single-mode transmission are also studied. The test shows that the trail sample has good single-mode transmission characteristics in 1 310 nm and 1 550 nm wavelength.