研制波长移相干涉仪时为了选出满足干涉仪设计指标的激光器和CCD相机，采用直接计算法和蒙特卡罗法对干涉仪系统中的主要随机误差进行建模仿真。介绍了菲佐型波长移相干涉仪的基本结构和测量原理，对振动、空气扰动和激光光源不稳定性等随机误差进行了理论分析，建立了相应的数学模型。结合误差模型进行数值仿真，获得了各随机误差大小与测量结果之间的数值对应关系，完成了激光器和CCD相机的选型和误差分配。搭建了波长移相干涉仪实验装置并对其重复性进行测量。实验结果表明，搭建的波长移相干涉仪的均方根(RMS)重复性优于0.07 nm，基本达到设计指标。

To choose proper laser and CCD for studying of wavelength phase-shifting interferometry, the main random errors are numerically simulated in the system based on direct algorithm and Monte-Carlo method. The basic structure of Fizeau wavelength phase-shifting interferometer and theory of measurement are introduced, the errors by vibrating, air turbulence and instability of laser frequence are analysed and the model is set up. Then, combined with the results of numerical simulation, the correspondence between each error and its measuring result is abtained, and proper laser and CCD are determined, simultaneously the error distribution is given. By setting up the interferometer and measuring, the results show that repeatability root-mean-square (RMS) error is better than 0.07 nm, which reaches the requirement.