在激光烧蚀过程中，靶材的吸收系数、热导率、电导率、密度和反射率参数随着温度变化而变化。当靶材表面温度接近热力学临界温度Tc时，靶材高温部分由金属向非金属转变。将靶材划分两个温度区域（0.8Tc以下和0.8Tc以上），对以上参数进行了建模计算。结合一维热传导方程，计算得到了铝靶温度、吸收系数、热导率、电导率、密度和反射率的时间和空间分布特性，并给出了烧蚀深度随激光能量的变化情况。数值计算结果与实验结果符合较好，验证了模型的正确性。

In the process of laser ablation, the target′s absorption coefficient, thermal conductivity, density and surface reflectivity are dependent on its temperature. When the target surface temperature approaches the thermodynamic critical temperature Tc, the high-temperature part of the target transits from metal to nonmetal. The target is divided into two temperature regions (below and above 0.8Tc) and a model is built up to calculate the above physical parameters. The temporal and spatial distribution of temperature, absorption coefficient and thermal conductivity of Al target are obtained by a one-dimensional heat conduction equation. Ablation depth is calculated as a function of laser pulse energies. Numerical results are in good agreement with the experimental results, which validate the presented model.