为了消除LIBS实际测量光谱谱线与标准的LIBS光谱谱线间存在的差值, 提高元素测量精准度, 提出了针对激光诱导击穿光谱测量偏差的物理影响因素研究。 实验在相同条件下, 对烧蚀孔效应和光谱波长的关系进行了测试, 研究了激光诱导击穿光谱高温Mg等离子体在1.00～3.00 μs范围采样延时下的斯塔克（Stark）展宽数据, 从而得出烧蚀孔效应和斯塔克延时展宽等物理因素对采集光谱造成的具体影响。 研究结果及方法完全可以应用于其他激光诱导击穿光谱实验系统的误差分析, 这对于提高LIBS技术的物质元素测量精准度, 研究LIBS技术的最佳采样延时时间, 具有重要意义。

In order to eliminate the deviation between the measured LIBS spectral line and the standard LIBS spectral line, and improve the accuracy of elements measurement, a research of physical deviation factors in laser induced breakdown spectroscopy technology was proposed. Under the same experimental conditions, the relationship of ablated hole effect and spectral wavelength was tested, the Stark broadening data of Mg plasma laser induced breakdown spectroscopy with sampling time-delay from 1.00 to 3.00 μs was also studied, thus the physical deviation influences such as ablated hole effect and Stark broadening could be obtained while collecting the spectrum. The results and the method of the research and analysis can also be applied to other laser induced breakdown spectroscopy experiment system, which is of great significance to improve the accuracy of LIBS elements measuring and is also important to the research on the optimum sampling time-delay of LIBS.