并行共焦测量技术的核心是将单点共焦测量变成多点同时扫描测量, 从而使共焦测量速度显著提高。本文介绍了共焦测量技术原理, 综述了用于并行共焦的并行光源技术, 分析了这些方法的优点和不足。结合作者近年来的研究成果, 重点阐述了基于微透镜阵列和数字微镜器件(DMD)产生并行光源的新方法。分析和研究了DMD的空间光调制机理, 最终建立了一种单光源双光路并行像散共焦测量系统。

Parallel confocal measurement technology changes traditional simple scanning into a multi-spot scanning, and it will improve the efficiency of measurement significantly. In this paper, the working principle of confocal measurement technology is introduced and some methods to produce a parallel light source in the parallel confocal measurement are surveyed. Then, it analyzes the advantages and disadvantages of these methods. At last, it presents the latest research achievements, and describes new methods to produce the parallel light source based on the micro lens array and the Digital Micro-lens Device(DMD). By analysis of the mechanism of spatial light modulation, it establishes a laser parallel astigmatism measuring system based on a parallel light source and dual beam paths.