激光与光电子学进展, 2013, 50 (12): 120001, 网络出版: 2013-12-20
硫系玻璃光子晶体光波导的制备研究进展 下载: 560次
Research Progress of Fabrication of Chalcogenide Glass Photonic Crystal Waveguide
材料 硫系玻璃 光子晶体波导 制备 光子晶体带隙 materials chalcogenide glass photonic crystal waveguide fabrication photonic crystal bandgap
摘要
光子晶体是一种介质常数周期性变化的人工介质材料,具有光子带隙和光子局域两个主要特征。光子晶体光波导是利用光子带隙特性传输光信息的光学器件。与传统的条形光波导相比,它最大的优势是在大的拐角处具有很低的传输损耗(如在60°弯曲时传输损耗可以降低到5%),因此非常适合用于集成光学。从硫系玻璃材料的特征入手,详细介绍了聚焦离子束和电子束曝光这两种光子晶体光波导常用的制备方法,通过这两种方法制备出来的光子晶体光波导都具有较高的表面平整度和较低的传输损耗。对两种方法的制备工艺和特点进行了比较。最后简单介绍了硫系光子晶体光波导的应用,并对硫系光子晶体光波导的发展前景做了展望。
Abstract
Photonic crystal is an artificial dielectric material whose dielectric constant changes periodically. It has two important features: photonic band gap and photon localization. Photonic crystal waveguide transmits light signal using photonic band gap. Compared with conventional strip waveguide, the most significant advantage of photonic crystal waveguide is that there is very little transmission loss at the corner (the loss can be decreased to about 5% at the corner of 60°). Therefore, photonic crystal waveguide has important applications in the field of integrated optics. In this paper, we start with the features of chalcogenide glass, and introduce two types of methods in fabricating photonic crystal waveguides of chalcogenide glass. Through these two fabrication methods, photonic crystal waveguides can be obtained with both high quality of surfaces and low transmission loss. The differences between the two methods are also compared and the applications of the photonic crystal waveguide based on chalcogenide glass are introduced. Finally, the prospects of the photonic crystal waveguide based on chalcogenide glass are put forward.
王贤旺, 张巍, 章亮, 李军建, 徐铁峰. 硫系玻璃光子晶体光波导的制备研究进展[J]. 激光与光电子学进展, 2013, 50(12): 120001. Wang Xianwang, Zhang Wei, Zhang Liang, Li Junjian, Xu Tiefeng. Research Progress of Fabrication of Chalcogenide Glass Photonic Crystal Waveguide[J]. Laser & Optoelectronics Progress, 2013, 50(12): 120001.