采用选择区域外延生长技术和对接再生长技术，设计并制作了10信道分布反馈激光器阵列与多模干涉耦合器的单片集成器件。器件中采用了新的技术，集成了钛薄膜热电阻用于波长调谐。集成器件烧结到热沉上后，在25 ℃温控条件下测试，激光器阵列的平均信道间隔为1.29 nm，阈值电流为22~30 mA；当激光器注入电流为200 mA，各信道的平均出光功率为0.5 mW。集成热电阻的调谐效率约为5 nm/W,通过施加合适的热电流调谐,该集成器件可以覆盖34路信道间隔为50 GHz的波长范围。集成器件可单波长选择输出，也可10信道同时运作合波输出。

A monolithic integration of ten distributed feedback lasers with a 10×1 multimode-interference optical combiner using the selective area growth technology is proposed and demonstrated. In the device, Titanium film thermal resistance for wavelength tuning are integrated with a novel procedure. The device is mounted on heat sink and tested at 20 ℃. The average channel spacing of the device is 1.29 nm. The average output power of lasers is 0.5 mW with a current of 200 mA and threshold currents of 25~30 mA. The tuning efficiency of integrated thermal resistance is about 5 nm/W. The integrated device can cover 34 channels on the 50 GHz ITU (international telecommunication union) grid with a suitable heating power, which can operate separately or simultaneously.