中国光学, 2013, 6 (6): 824, 网络出版: 2013-12-24
表面改性碳化硅基底反射镜加工技术现状
Manufacture technology status of surface modified silicon carbide mirrors
摘要
针对表面改性SiC基底反射镜在空间光学系统中的应用, 总结了该类反射镜在国内外的研究现状。概括了碳化硅基底反射镜的发展趋势。介绍了常用的碳化硅材料, 分析了它们的性质。给出了几种常用的碳化硅镜坯制备工艺, 包括成型、改性和不同的抛光技术。通过对国内现有加工工艺和改性技术的分析, 总结出了适应我国的表面改性碳化硅反射镜加工的发展方向。
Abstract
On the basis of the applications of surface modified silicon carbine mirrors in space optical systems, this paper summarizes the research status and developing trends of this kinds of mirrors at home and abroad. It introduces the widely used silicon carbide materials and their different properties, then gives several kinds of preparation technics of the silicon carbide mirror blanks, such as moulding, modification and different polishing methods. Based on the analysis of manufacture and modification process, a way to improve the manufacture technology of silicon carbide mirrors in China is summed up.
康健, 宣斌, 谢京江. 表面改性碳化硅基底反射镜加工技术现状[J]. 中国光学, 2013, 6(6): 824. KANG Jian, XUAN Bin, XIE Jing-jiang. Manufacture technology status of surface modified silicon carbide mirrors[J]. Chinese Optics, 2013, 6(6): 824.